Design and fabrication of ultrahigh Q chip-based silica WGM micro-resonators for single-atom cavity-QED

Tal Shahar Ohana*, Gabriel Guendelman, Eran Mishuk, Nadav Kandel, Dror Garti, Doron Gurovich, Ora Bitton, Barak Dayan

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Of the many applications of whispering-gallery-mode (WGM) micro-resonators, single-atom cavity quantum electrodynamics (cavity-QED) poses the most extreme demands on mode volume, dimensions, and quality factor (Q). Here we present the procedure for the fabrication of chip-based, small mode-volume, ultrahigh-Q silica WGM micro-resonators, designed for single-emitter cavity-QED. We demonstrate micro-resonators at varying geometries, from toroidal to micro-spheres, yielding ultrahigh-qualities as high as 1.7 × 108 at 780nm. We present a comprehensive theoretical model that allows tailoring the fabrication process to attain the desired micro-resonator geometry.

Original languageEnglish
Pages (from-to)43974-43986
Number of pages13
JournalOptics Express
Volume32
Issue number25
Early online date18 Nov 2024
DOIs
Publication statusPublished - 2 Dec 2024

Funding

This research was made possible in part by the historic generosity of the Harold Perlman family. We thank the Weizmann Nanofabrication unit staff, especially Assaf Hazzan, Leonid Tunik and Sharon Garusi for their kind support in the fabrication process of the WGMs. B. Dayan is the Dan Lebas and Roth Sonnewend Professorial Chair of Physics.

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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