TY - GEN
T1 - MEASUREMENT OF MICROMECHANICAL PROPERTIES USING A BIDIRECTIONAL ATOMIC FORCE MICROSCOPE WITH CAPACITATIVE DETECTION
AU - NEUBAUER, Gabi
AU - COHEN, Sidney R.
AU - MCCLELLAND, Garry M.
PY - 1989
Y1 - 1989
N2 - A new UHV atomic force microscope for the study of micromechanical properties is described. A capacitance technique is used, which enables simultaneous measurement of forces perpendicular and parallel to the surface (i.e., load and friction), and has low noise down to frequencies below 0.1 Hz. Preliminary results for Ir- and W-tips sliding on graphite and silicon, respectively, demonstrate the capabilities of this new instrument.
AB - A new UHV atomic force microscope for the study of micromechanical properties is described. A capacitance technique is used, which enables simultaneous measurement of forces perpendicular and parallel to the surface (i.e., load and friction), and has low noise down to frequencies below 0.1 Hz. Preliminary results for Ir- and W-tips sliding on graphite and silicon, respectively, demonstrate the capabilities of this new instrument.
U2 - 10.1557/PROC-153-307
DO - 10.1557/PROC-153-307
M3 - Conference contribution
SN - 1-55899-026-7
T3 - MATERIALS RESEARCH SOCIETY CONFERENCE PROCEEDINGS
SP - 307
EP - 316
BT - INTERFACES BETWEEN POLYMERS, METALS, AND CERAMICS
A2 - DEKOVEN, BM
A2 - GELLMAN, AJ
A2 - ROSENBERG, R
T2 - SYMP AT THE 1989 SPRING MEETING OF THE MATERIALS RESEARCH SOC : INTERFACES BETWEEN POLYMERS, METALS, AND CERAMICS
Y2 - 25 April 1989 through 27 April 1989
ER -