Method to control deposition rate instabilities - High power impulse magnetron sputtering deposition of TiO2

Anna Kossoy, Rögnvaldur L. Magnusson, Tryggvi K. Tryggvason, Kristjan Leosson, Sveinn Olafsson

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

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Engineering