Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus: Introduction to Electrolithography and Its Prospects

Praveen Kumar; Rudra Pratap; Santanu Talukder; Sumit Kumar; Vijayendra Shastri; Raman Maurya; Mruthyunjaya K. B. Swamy

doi:10.1109/3M-NANO.2018.8552166

Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus: Introduction to Electrolithography and Its Prospects

Praveen Kumar^*, Rudra Pratap, Santanu Talukder, Sumit Kumar, Vijayendra Shastri, Raman Maurya, Mruthyunjaya K. B. Swamy

^*Corresponding author for this work

Department of Molecular Chemistry and Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Here, we introduce electrolithography, which is a recently developed lithography technique. Upon passage of electric current through a pointy cathode electrode placed on Cr film leads to formation and liquefaction of a Cr compound, which then flows away from the cathode in a radially symmetric fashion, thereby removing the Cr layer. If the pointy electrode, akin to a stylus, is traversed along a path, a trench will be patterned in the Cr film, which can then be transferred to other materials. Firstly, we describe the process of electrolithography and then we discuss the effects of the force applied on the stylus and the polymer layer placed in between substrate and Cr film on this lithography process. Finally, we discuss future prospects of electrolithography.

Original language	English
Title of host publication	2018 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) - CONFERENCE PROCEEDINGS
Editors	M Yu, ZK Weng
Pages	181-185
Number of pages	5
ISBN (Electronic)	9781538662144
DOIs	https://doi.org/10.1109/3M-NANO.2018.8552166
Publication status	Published - 2018
Event	IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Hangzhou, China Duration: 13 Aug 2018 → 17 Aug 2018 Conference number: 2018

Publication series

Series	2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings

Conference

Conference	IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
Country/Territory	China
City	Hangzhou
Period	13/8/18 → 17/8/18

All Science Journal Classification (ASJC) codes

Industrial and Manufacturing Engineering
Mechanical Engineering
Instrumentation

Access to Document

10.1109/3M-NANO.2018.8552166

Cite this

Kumar, P., Pratap, R., Talukder, S., Kumar, S., Shastri, V., Maurya, R., & Swamy, M. K. B. (2018). Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus: Introduction to Electrolithography and Its Prospects. In M. Yu, & ZK. Weng (Eds.), 2018 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) - CONFERENCE PROCEEDINGS (pp. 181-185). Article 8552166 https://doi.org/10.1109/3M-NANO.2018.8552166

Kumar, Praveen ; Pratap, Rudra ; Talukder, Santanu et al. / Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus : Introduction to Electrolithography and Its Prospects. 2018 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) - CONFERENCE PROCEEDINGS. editor / M Yu ; ZK Weng. 2018. pp. 181-185 (2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings).

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title = "Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus: Introduction to Electrolithography and Its Prospects",

abstract = "Here, we introduce electrolithography, which is a recently developed lithography technique. Upon passage of electric current through a pointy cathode electrode placed on Cr film leads to formation and liquefaction of a Cr compound, which then flows away from the cathode in a radially symmetric fashion, thereby removing the Cr layer. If the pointy electrode, akin to a stylus, is traversed along a path, a trench will be patterned in the Cr film, which can then be transferred to other materials. Firstly, we describe the process of electrolithography and then we discuss the effects of the force applied on the stylus and the polymer layer placed in between substrate and Cr film on this lithography process. Finally, we discuss future prospects of electrolithography.",

author = "Praveen Kumar and Rudra Pratap and Santanu Talukder and Sumit Kumar and Vijayendra Shastri and Raman Maurya and Swamy, \{Mruthyunjaya K. B.\}",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) ; Conference date: 13-08-2018 Through 17-08-2018",

year = "2018",

doi = "10.1109/3M-NANO.2018.8552166",

language = "English",

series = "2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings",

pages = "181--185",

editor = "M Yu and ZK Weng",

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Kumar, P, Pratap, R, Talukder, S, Kumar, S, Shastri, V, Maurya, R & Swamy, MKB 2018, Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus: Introduction to Electrolithography and Its Prospects. in M Yu & ZK Weng (eds), 2018 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) - CONFERENCE PROCEEDINGS., 8552166, 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings, pp. 181-185, IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Hangzhou, China, 13/8/18. https://doi.org/10.1109/3M-NANO.2018.8552166

Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus: Introduction to Electrolithography and Its Prospects. / Kumar, Praveen; Pratap, Rudra; Talukder, Santanu et al.
2018 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) - CONFERENCE PROCEEDINGS. ed. / M Yu; ZK Weng. 2018. p. 181-185 8552166 (2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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T1 - Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus

T2 - IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

AU - Kumar, Praveen

AU - Pratap, Rudra

AU - Talukder, Santanu

AU - Kumar, Sumit

AU - Shastri, Vijayendra

AU - Maurya, Raman

AU - Swamy, Mruthyunjaya K. B.

N1 - Conference code: 2018

PY - 2018

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N2 - Here, we introduce electrolithography, which is a recently developed lithography technique. Upon passage of electric current through a pointy cathode electrode placed on Cr film leads to formation and liquefaction of a Cr compound, which then flows away from the cathode in a radially symmetric fashion, thereby removing the Cr layer. If the pointy electrode, akin to a stylus, is traversed along a path, a trench will be patterned in the Cr film, which can then be transferred to other materials. Firstly, we describe the process of electrolithography and then we discuss the effects of the force applied on the stylus and the polymer layer placed in between substrate and Cr film on this lithography process. Finally, we discuss future prospects of electrolithography.

AB - Here, we introduce electrolithography, which is a recently developed lithography technique. Upon passage of electric current through a pointy cathode electrode placed on Cr film leads to formation and liquefaction of a Cr compound, which then flows away from the cathode in a radially symmetric fashion, thereby removing the Cr layer. If the pointy electrode, akin to a stylus, is traversed along a path, a trench will be patterned in the Cr film, which can then be transferred to other materials. Firstly, we describe the process of electrolithography and then we discuss the effects of the force applied on the stylus and the polymer layer placed in between substrate and Cr film on this lithography process. Finally, we discuss future prospects of electrolithography.

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DO - 10.1109/3M-NANO.2018.8552166

M3 - Conference contribution

T3 - 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings

SP - 181

EP - 185

BT - 2018 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) - CONFERENCE PROCEEDINGS

A2 - Yu, M

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Y2 - 13 August 2018 through 17 August 2018

ER -

Kumar P, Pratap R, Talukder S, Kumar S, Shastri V, Maurya R et al. Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus: Introduction to Electrolithography and Its Prospects. In Yu M, Weng ZK, editors, 2018 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) - CONFERENCE PROCEEDINGS. 2018. p. 181-185. 8552166. (2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2018 - Proceedings). doi: 10.1109/3M-NANO.2018.8552166

Patterning Cr Film by Passing Electric Current through a Traversing Pointy Stylus: Introduction to Electrolithography and Its Prospects

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